High Quality Factors in Superlattice Ferroelectric Hf0.5Zr0.5O2 Nanoelectromechanical Resonators.
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DOI: 10.1021/acsami.2c08414
Abstract: The discovery of ferroelectricity and advances in creating polar structures in atomic-layered hafnia-zirconia (HfxZr1-xO2) films spur the exploration of using the material for novel integrated nanoelectromechanical systems (NEMS). Despite its popularity, the approach to achieving… read more here.
Keywords: 5zr0 5o2; quality factors; hf0 5zr0; nanoelectromechanical resonators ... See more keywords