NanoFab with SIMS - Recent Results from the BAM-L200 Analytical Standard and Semiconductor Samples
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DOI: 10.1017/s1431927618004749
Abstract: The ZEISS ORION NanoFab is a multi-ion beam platform which makes available a combination of helium, neon, and gallium focused ion beams (FIBs). The helium beam is commonly used for imaging, and in this capacity… read more here.
Keywords: sims recent; results bam; nanofab sims; ion ... See more keywords