Batch-Fabricated α-Si Assisted Nanogap Tunneling Junctions
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DOI: 10.3390/nano9050727
Abstract: This paper details the design, fabrication, and characterization of highly uniform batch-fabricated sidewall etched vertical nanogap tunneling junctions for bio-sensing applications. The device consists of two vertically stacked gold electrodes separated by a partially etched… read more here.
Keywords: spacer; nanogap tunneling; batch fabricated; fabricated assisted ... See more keywords