High-Performance Indium-Based Oxide Transistors with Multiple Channels Through Nanolaminate Structure Fabricated by Plasma-Enhanced Atomic Layer Deposition.
Sign Up to like & getrecommendations! Published in 2023 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.3c00038
Abstract: An atomic-layer-deposited oxide nanolaminate (NL) structure with 3 dyads where a single dyad consists of a 2-nm-thick confinement layer (CL) (In0.84Ga0.16O or In0.75Zn0.25O), and a barrier layer (BL) (Ga2O3) was designed to obtain superior electrical… read more here.
Keywords: multiple channels; structure; atomic layer; nanolaminate structure ... See more keywords
Improvement of endurance and switching speed in Hf1−x Zr x O2 thin films using a nanolaminate structure
Sign Up to like & getrecommendations! Published in 2022 at "Nanotechnology"
DOI: 10.1088/1361-6528/ac79bb
Abstract: To improve the endurance and polarization switching speed of Hf1−x Zr x O2 (HZO) ferroelectric films, we designed a 10 nm Hf0.5Zr0.5O2 + ZrO2 (HZZ) nanolaminate structure. Three films with different ZrO2 interlayers thicknesses were… read more here.
Keywords: switching speed; speed hf1; nanolaminate structure; endurance ... See more keywords