Nanolithography of biointerfaces.
Sign Up to like & getrecommendations! Published in 2019 at "Faraday discussions"
DOI: 10.1039/c9fd00082h
Abstract: This article is based on the Concluding remarks made at the Faraday Discussion meeting on Nanolithography of Biointerfaces, held in London, UK, 3-5th July 2019. read more here.
Keywords: nanolithography biointerfaces; nanolithography;
On the role of target mass in extreme ultraviolet light generation from CO2-driven tin plasmas for nanolithography
Sign Up to like & getrecommendations! Published in 2024 at "Physics of Plasmas"
DOI: 10.1063/5.0200206
Abstract: Target conditioning is a crucial ingredient of high-power extreme ultraviolet (EUV) source operation in state-of-the-art nanolithography. It involves deforming tin microdroplets into tens of nanometer-thin sheets, sheets which are subsequently irradiated by intense CO2 laser… read more here.
Keywords: mass; nanolithography; extreme ultraviolet; target ... See more keywords
Advanced optical nanolithography by enhanced transmission through bull’s eye nanostructured meta-mask
Sign Up to like & getrecommendations! Published in 2023 at "Nanophotonics"
DOI: 10.1515/nanoph-2023-0145
Abstract: Abstract Plasmonic optical nanolithography using extraordinary optical transmission through a metallic nanohole mask has been actively applied to the high-resolution fabrication of nanostructures over a large area. Although there have been studies on improving the… read more here.
Keywords: optical nanolithography; nanolithography; bull eye; meta mask ... See more keywords