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Published in 2017 at "Optics express"
DOI: 10.1364/oe.25.025201
Abstract: We present a method for 3D sub-nanometer displacement measurement using a set of differential optical shadow sensors. It is based on using pairs of collimated beams on opposite sides of an object that are partially…
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Keywords:
differential optical;
displacement measurement;
displacement;
nanometer displacement ... See more keywords