Nanometric positioning accuracy in the presence of presliding and sliding friction: Modelling, identification and compensation
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DOI: 10.1080/15397734.2016.1149487
Abstract: ABSTRACT Presliding and sliding frictional effects, limiting the performances of ultrahigh precision mechatronics devices, are studied in this work. The state-of-the-art related to frictional behavior in both motion regimes is, hence, considered, and the generalized… read more here.
Keywords: nanometric positioning; compensation; positioning accuracy; friction ... See more keywords