Coherent Fourier scatterometry nanoparticle detection enhanced by synthetic optical holography.
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DOI: 10.1364/ol.463807
Abstract: We demonstrate that the sensitivity of nanoparticle detection on surfaces can be substantially improved by implementing synthetic optical holography (SOH) in coherent Fourier scatterometry (CFS), resulting in a phase-sensitive confocal differential detection technique that operates… read more here.
Keywords: nanoparticle detection; fourier scatterometry; synthetic optical; detection ... See more keywords