Atomic layer deposition of Rh nanoparticles on WO3 thin film for CH4 gas sensing with enhanced detection characteristics
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DOI: 10.1016/j.ceramint.2019.12.094
Abstract: Abstract CH4 gas sensor was fabricated by depositing WO3 film (200 nm) on a ceramic substrate through E-beam evaporation, followed by depositing Rh nanoparticles on WO3 through Atomic Layer Deposition (ALD). The amount of Rh nanoparticles… read more here.
Keywords: wo3 thin; thin film; gas; nanoparticles wo3 ... See more keywords