Nanopatterning of GeTe phase change films via heated-probe lithography.
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DOI: 10.1039/c7nr01482a
Abstract: The crystallization of amorphous germanium telluride (GeTe) thin films is controlled with nanoscale resolution using the heat from a thermal AFM probe. The dramatic differences between the amorphous and crystalline GeTe phases yield embedded nanoscale… read more here.
Keywords: phase change; probe; nanopatterning gete; gete phase ... See more keywords