Fabrication of nanopores and nanoslits with feature sizes down to 5 nm by wet etching method.
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DOI: 10.1088/1361-6528/aaa523
Abstract: This paper presents an improved three-step wet etching method for the fabrication of single-crystal silicon nanopores and nanoslists. A diffusion model was built to analyze the influence of the color-based feedback mechanism on the final… read more here.
Keywords: nanopores nanoslits; fabrication; etching method; wet etching ... See more keywords