A novel hybrid actuation mechanism based XY nanopositioning stage with totally decoupled kinematics
Sign Up to like & getrecommendations! Published in 2018 at "Mechanical Systems and Signal Processing"
DOI: 10.1016/j.ymssp.2017.07.010
Abstract: Abstract This paper reports the design, analysis and testing of a parallel two degree-of-freedom piezo-actuated compliant stage for XY nanopositioning by introducing an innovative hybrid actuation mechanism. It mainly features the combination of two Scott–Russell… read more here.
Keywords: nanopositioning stage; hybrid actuation; kinematics; actuation mechanism ... See more keywords
Design of a Long Stroke Nanopositioning Stage With Self-Damping Actuator and Flexure Guide
Sign Up to like & getrecommendations! Published in 2022 at "IEEE Transactions on Industrial Electronics"
DOI: 10.1109/tie.2021.3126981
Abstract: Long stroke nanopositioning stages with high natural frequency and compact size are demanded in precision engineering. However, in previous researches, the natural frequency of the long stroke nanopositioning stage is normally below 50 Hz because… read more here.
Keywords: flexure guide; nanopositioning stage; long stroke; stage ... See more keywords
Characteristic analysis of a micro-/nanopositioning stage with coupling errors by the gravity
Sign Up to like & getrecommendations! Published in 2019 at "Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science"
DOI: 10.1177/0954406219850592
Abstract: The piezo-actuated micro-/nanopositioning stages are often used in the current precision engineering applications, and the coupling deformation under the gravity of the stage is critical to error analysis. Considering the torsional deformation and bending deformation… read more here.
Keywords: nanopositioning stage; analysis; deformation; micro nanopositioning ... See more keywords
A Novel Stick-Slip Nanopositioning Stage Integrated with a Flexure Hinge-Based Friction Force Adjusting Structure
Sign Up to like & getrecommendations! Published in 2020 at "Micromachines"
DOI: 10.3390/mi11080765
Abstract: The piezoelectrically-actuated stick-slip nanopositioning stage (PASSNS) has been applied extensively, and many designs of PASSNSs have been developed. The friction force between the stick-slip surfaces plays a critical role in successful movement of the stage,… read more here.
Keywords: nanopositioning stage; stick slip; friction force; slip nanopositioning ... See more keywords