Design and performance of a test rig for evaluation of nanopositioning stages
Sign Up to like & getrecommendations! Published in 2019 at "Measurement Science and Technology"
DOI: 10.1088/1361-6501/aafd03
Abstract: Nanopositioning stages are used in many areas of nanotechnology and advanced materials analysis, often being integrated into analytical devices such as scanning probe and optical microscopes and manufacturing devices (e.g. lithographic systems). We present a… read more here.
Keywords: nanopositioning stages; performance; evaluation; design performance ... See more keywords
A rate-dependent KP modeling and direct compensation control technique for hysteresis in piezo-nanopositioning stages
Sign Up to like & getrecommendations! Published in 2021 at "Journal of Intelligent Material Systems and Structures"
DOI: 10.1177/1045389x211023583
Abstract: This paper first presents a rate-dependent Krasnosel’skii-Pokrovskii (RKP) model to capture the hysteresis of piezo-nanopositioning stages. The dynamic density function of the RKP model is obtained via neural network with frequency behavior input signal. Under… read more here.
Keywords: piezo nanopositioning; nanopositioning stages; rate dependent; hysteresis ... See more keywords