Nanoscale compositional segregation in epitaxial AlScN on Si (111).
Sign Up to like & getrecommendations! Published in 2023 at "Nanoscale horizons"
DOI: 10.1039/d2nh00567k
Abstract: We report the growth of epitaxial wurtzite AlScN thin films on Si (111) substrates with a wide range of Sc concentrations using ultra-high vacuum reactive sputtering. Sc alloying in AlN enhances piezoelectricity and induces ferroelectricity,… read more here.
Keywords: epitaxial alscn; compositional segregation; nanoscale compositional; segregation ... See more keywords
Nanoscale compositional analysis of wurtzite BAlN thin film using atom probe tomography
Sign Up to like & getrecommendations! Published in 2020 at "Applied Physics Letters"
DOI: 10.1063/5.0027861
Abstract: In this work, the local atomic level composition of BAlN films with ∼20% B was investigated using atom probe tomography. Dislocations and elemental clustering were confirmed along which Al atoms tend to segregate. The presence… read more here.
Keywords: atom probe; using atom; compositional analysis; probe tomography ... See more keywords