Research on mechanism of nanoscale cutting with arc trajectory for monocrystalline silicon based on molecular dynamics simulation
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DOI: 10.1016/j.commatsci.2019.109175
Abstract: Abstract Movement trajectory of diamond tool during an ultra-precision cutting may be nonlinear due to external vibrations. Hence, we investigate nanoscale cutting of monocrystalline silicon using molecular dynamics simulation when the diamond tool trajectory contains… read more here.
Keywords: dynamics simulation; nanoscale cutting; molecular dynamics; arc radius ... See more keywords