Nanoscale Doping and Its Impact on the Ferroelectric and Piezoelectric Properties of Hf0.5Zr0.5O2
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DOI: 10.3390/nano12091483
Abstract: Ferroelectric hafnium oxide thin films—the most promising materials in microelectronics’ non-volatile memory—exhibit both unconventional ferroelectricity and unconventional piezoelectricity. Their exact origin remains controversial, and the relationship between ferroelectric and piezoelectric properties remains unclear. We introduce… read more here.
Keywords: piezoelectric properties; nanoscale doping; ferroelectric piezoelectric; 5zr0 5o2 ... See more keywords