In Situ Planarization of Huygens Metasurfaces by Nanoscale Local Oxidation of Silicon
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DOI: 10.1021/acsphotonics.7b00688
Abstract: Metasurfaces are becoming a flourishing field of research, with diverse applications, such as planar optical components and structural colors. While metallic metasurfaces are typically few tens of nanometers in their thickness, their dielectric counterparts typically… read more here.
Keywords: oxidation silicon; huygens metasurfaces; silicon; local oxidation ... See more keywords