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Published in 2019 at "Journal of Mechanical Science and Technology"
DOI: 10.1007/s12206-019-0432-9
Abstract: Nanoscratch testing is a highly reliable method used to extract a variety of film properties. It is proven that many of the experimental factors can influence the obtained results, such as the probe tilt, the…
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Keywords:
surface roughness;
surface;
finite element;
effect surface ... See more keywords