The Application of Scallop Nanostructure in Deep Silicon Etching.
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DOI: 10.1088/1361-6528/ab88f0
Abstract: Micro/nanostructures with high aspect ratio in silicon wafer obtained by plasma etching are of great significance in device fabrication. In most cases, scallop nanostructure in deep silicon etching should be suppressed. However, scallop nanostructure could… read more here.
Keywords: silicon etching; nanostructure deep; scallop nanostructure; deep silicon ... See more keywords