Patterning and control of the nanostructure in plasma thin films with acoustic waves: mechanical vs. electrical polarization effects
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DOI: 10.1039/d0mh01540g
Abstract: Plasma thin film deposition assisted with acoustic waves renders a patterned structure due to sheath ions local bombardment effects. read more here.
Keywords: control nanostructure; nanostructure plasma; patterning control; acoustic waves ... See more keywords