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Published in 2019 at "Microscopy and Microanalysis"
DOI: 10.1017/s1431927619008389
Abstract: Focused electron-beam deposition is a convenient addition to state-of-the-art resist-based patterning techniques. It employs local chemical vapor deposition (CVD) from a precursor gas induced by the beam, allowing the growth of nm scale features [1].…
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Keywords:
ultra thin;
patterned ultra;
gold nanostructures;
thin gold ... See more keywords