STM patterned nanowire measurements using photolithographically defined implants in Si(100)
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DOI: 10.1038/s41598-018-20042-8
Abstract: Using photolithographically defined implant wires for electrical connections, we demonstrate measurement of a scanning tunneling microscope (STM) patterned nanoscale electronic device on Si(100). By eliminating onerous alignment and complex lithography techniques, this approach is accessible… read more here.
Keywords: stm; using photolithographically; nanowire measurements; patterned nanowire ... See more keywords