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Published in 2018 at "IEEE Electron Device Letters"
DOI: 10.1109/led.2018.2807389
Abstract: In this letter, Gate-All-Around (GAA) nanowire (NW) p-MOSFETs with new approaches to fabricate totally isolated channels in replacement metal gate (RMG) are reported for the first time. Few reformed fin forming processes based on conventional…
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Keywords:
short channel;
nanowire mosfets;
process;
gaa nanowire ... See more keywords
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recommendations!
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Published in 2018 at "IEEE Transactions on Electron Devices"
DOI: 10.1109/ted.2018.2824985
Abstract: This paper reports on the normally off GaN vertical MOSFETs based on nanowires (NWs) with an inverted p-GaN channel and a wrap-around-gate structure for the first time. Both inductively coupled plasma dry reactive-ion etching and…
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Keywords:
gan channel;
normally vertical;
gan nanowire;
nanowire mosfets ... See more keywords