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Published in 2020 at "Beilstein Journal of Nanotechnology"
DOI: 10.3762/bjnano.11.104
Abstract: Currently, the patterning of innovative three-dimensional (3D) nano-objects is required for the development of future advanced electronic components. Helium ion microscopy in combination with a precursor gas can be used for direct writing of three-dimensional…
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Keywords:
direct writing;
microscopy;
hollow nanowires;
nanowires tailored ... See more keywords