Narrow ridge GaSb-based cascade diode lasers fabricated by methane–hydrogen reactive ion etching
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DOI: 10.1049/el.2016.3394
Abstract: GaSb-based type-I quantum wells cascade diode lasers with nearly diffraction limited output beam were fabricated using methane–hydrogen dry etching plasma process. Rapid thermal annealing was shown to be a necessary step to reverse the effect… read more here.
Keywords: hydrogen; methane hydrogen; diode lasers; cascade diode ... See more keywords