Crystal Structure, Microstructure and Mechanical Properties of NbN Coatings Deposited by Asymmetric Bipolar Pulsed DC Sputtering
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DOI: 10.4191/kcers.2017.54.1.02
Abstract: Single phase niobium nitride (NbN) coatings were deposited using asymmetric bipolar pulsed dc sputtering by varying pulse frequency and duty cycle of pulsed plasmas. Crystal structure, microstructure, morphology and mechanical properties were examined using XRD,… read more here.
Keywords: asymmetric bipolar; bipolar pulsed; coatings deposited; structure ... See more keywords