Effects of C/Si ratios on structures and behaviors of NbSiCN nanocomposite films synthesized by reactive magnetron sputtering
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DOI: 10.1016/j.matchar.2020.110466
Abstract: Abstract A variety of quarternary NbSiCN nanocomposite films, which with the different Si and Ni contents, are deposited on Si (100) substrates by the reactive magnetron sputtering. The X-ray diffraction, field-emission scanning electron microscopy, high-resolution… read more here.
Keywords: magnetron sputtering; microscopy; nbsicn nanocomposite; nanocomposite films ... See more keywords