Hard and tough (NbTaMoW)Nx high entropy nitride films with sub-stoichiometric nitrogen
Sign Up to like & getrecommendations! Published in 2022 at "Journal of Alloys and Compounds"
DOI: 10.1016/j.jallcom.2021.161713
Abstract: Abstract (NbTaMoW)Nx films with different x value were prepared by reactive magnetron sputtering in a mixed Ar/N2 atmosphere at 575 K. The films deposited at fN (fN=N2/Ar+N2) of 0-25% corresponds to the N/Me composition ratio x… read more here.
Keywords: films sub; sub stoichiometric; nitride films; nbtamow films ... See more keywords