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Published in 2022 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.2c09291
Abstract: In this work, a compact, near-hysteresis-free hydraulic pressure sensor is presented through interface engineering in a GaN chip-scale optical device. The sensor consists of a monolithic GaN-on-sapphire device responsible for light emission and detection and…
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Keywords:
pressure;
interface engineering;
near hysteresis;
hysteresis free ... See more keywords