Structural Properties of Al-O Monolayers in SiO2 on Silicon and the Maximization of Their Negative Fixed Charge Density.
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DOI: 10.1021/acsami.8b06098
Abstract: Al2O3 on Si is known to form an ultrathin interfacial SiO2 during deposition and subsequent annealing, which creates a negative fixed charge ( Qfix) that enables field-effect passivation and low surface recombination velocities in Si… read more here.
Keywords: negative fixed; structural properties; sio2; fixed charge ... See more keywords