High-mobility and low subthreshold swing amorphous InGaZnO thin-film transistors by in situ H2 plasma and neutral oxygen beam irradiation treatment
Sign Up to like & getrecommendations! Published in 2023 at "Nanotechnology"
DOI: 10.1088/1361-6528/acb5f9
Abstract: In this work, staggered bottom-gate structure amorphous In–Ga–Zn–O (a-IGZO) thin film transistors (TFTs) with high-k ZrO2 gate dielectric were fabricated using low-cost atmospheric pressure-plasma enhanced chemical vapor deposition (AP-PECVD) with in situ hydrogenation to modulate… read more here.
Keywords: neutral oxygen; low subthreshold; oxygen beam; subthreshold swing ... See more keywords
A Review of Recombination Coefficients of Neutral Oxygen Atoms for Various Materials
Sign Up to like & getrecommendations! Published in 2023 at "Materials"
DOI: 10.3390/ma16051774
Abstract: Relevant data on heterogeneous surface recombination of neutral oxygen atoms available in the scientific literature are reviewed and discussed for various materials. The coefficients are determined by placing the samples either in non-equilibrium oxygen plasma… read more here.
Keywords: recombination coefficients; neutral oxygen; recombination; various materials ... See more keywords