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Published in 2017 at "Ferroelectrics"
DOI: 10.1080/00150193.2017.1367241
Abstract: ABSTRACT A new microvalve controlled by surface acoustic wave was presented. A shape memory alloy (SMA) with plastic sheet was integrated into a printed circuit board by way of small copper pipe. A 128°-YX LiNbO3…
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Keywords:
acoustic wave;
controlled surface;
new microvalve;
surface acoustic ... See more keywords