A scalable zinc-based coordination network for energy-efficient NF3/CF4 separation with unprecedented selectivity
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DOI: 10.1039/d5sc04966k
Abstract: Nitrogen trifluoride (NF3) and carbon tetrafluoride (CF4) are critical gases in the semiconductor industry. However, their current lack of effective recycling and separation results in significant waste emissions, which are not only costly but also… read more here.
Keywords: zinc based; cf4 separation; separation; nf3 cf4 ... See more keywords