High sensitive NH3 sensor based on electrochemically etched porous silicon
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DOI: 10.1080/23311916.2020.1810880
Abstract: Abstract In the current study, porous silicon (por-Si) samples were fabricated by electrochemical etching at different times (20 min, 40 min, 60 min). Scanning electron microscope (SEM) images of horizontal cross-sections of the samples showed… read more here.
Keywords: sensitive nh3; high sensitive; nh3 sensor; porous silicon ... See more keywords