Silicon nitride assisted 1×64 optical phased array based on a SOI platform.
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DOI: 10.1364/oe.420921
Abstract: We demonstrate a 1×64 optical phased array (OPA) based on a silicon on insulator (SOI) platform with integrated silicon nitride. The input port of the OPA is fabricated using a silicon nitride waveguide due to… read more here.
Keywords: soi platform; silicon nitride; nitride assisted; silicon ... See more keywords