High-Q tellurium-oxide-coated silicon nitride microring resonators.
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DOI: 10.1364/ol.44.000118
Abstract: We report on tellurium-oxide (TeO2)-coated silicon nitride microring resonators with internal quality factors up to 7.3×105, corresponding to 0.5 dB/cm waveguide loss, at wavelengths around 1550 nm. The microring resonators are fabricated using a silicon nitride foundry… read more here.
Keywords: silicon nitride; tellurium oxide; nitride microring; coated silicon ... See more keywords