Role of high nitrogen flux in InAlN growth by plasma-assisted molecular beam epitaxy
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DOI: 10.1016/j.jcrysgro.2020.125720
Abstract: Abstract We study the impact of increased active nitrogen flux (N-flux) on the indium content and structural properties of InAlN layers grown by plasma-assisted molecular beam epitaxy. It is shown that high N-flux can stabilize… read more here.
Keywords: growth; nitrogen flux; flux; plasma assisted ... See more keywords