A Thermopile Infrared Sensor Array Pixel Monolithically Integrated with an NMOS Switch
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DOI: 10.3390/mi13020258
Abstract: In this article, we present the design, fabrication, and characterization of a thermopile infrared sensor array (TISA) pixel. This TISA pixel is composed of a dual-layer p+/n- poly-Si thermopile with a closed membrane and an… read more here.
Keywords: thermopile infrared; thermopile; pixel; sensor array ... See more keywords