A non-lithographic plasma nanoassembly technology for polymeric nanodot and silicon nanopillar fabrication
Sign Up to like & getrecommendations! Published in 2019 at "Frontiers of Chemical Science and Engineering"
DOI: 10.1007/s11705-019-1809-0
Abstract: In this work, we present plasma etching alone as a directed assembly method to both create the nanodot pattern on an etched polymeric (PMMA) film and transfer it to a silicon substrate for the fabrication… read more here.
Keywords: plasma; fabrication; plasma nanoassembly; silicon ... See more keywords
Non-lithographic nanofluidic channels with precisely controlled circular cross sections
Sign Up to like & getrecommendations! Published in 2018 at "RSC Advances"
DOI: 10.1039/c8ra03496f
Abstract: Nanofluidic channels have received growing interest due to their potential for applications in the manipulation of nanometric objects, such as DNA, proteins, viruses, exosomes, and nanoparticles. Although significant advances in nanolithography-based fabrication techniques over the… read more here.
Keywords: lithographic nanofluidic; nanofluidic channels; circular cross; non lithographic ... See more keywords