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Published in 2019 at "Measurement Science and Technology"
DOI: 10.1088/1361-6501/ab1d27
Abstract: Non-raster scanning has been proved to be an effective approach to dramatically improve the efficiency of the scanning probe microscopy without sophisticated scanners and controllers. However, the metrological performance of the method largely depends on…
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Keywords:
regression;
microscopy;
non raster;
raster scanning ... See more keywords