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Published in 2022 at "Micromachines"
DOI: 10.3390/mi13070988
Abstract: In this paper, we explore the applicability of the positioning stage based on flexible hinges for noncontact processing. According to the actual application of the positioning stage, Hooke’s law, the Euler–Bernoulli beam theory, and the…
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Keywords:
positioning stage;
platform;
noncontact processing;
analysis ... See more keywords