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Published in 2019 at "Instruments and Experimental Techniques"
DOI: 10.1134/s0020441219020258
Abstract: Abstract—A source of low-temperature nonequilibrium argon plasma has been developed on the basis of a special form of the diffusion discharge, that is, a glow discharge on which low-current spark discharges are superimposed. The discharge…
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Keywords:
low temperature;
source;
nonequilibrium argon;
temperature nonequilibrium ... See more keywords