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Published in 2022 at "Micromachines"
DOI: 10.3390/mi13030393
Abstract: In this paper, we use the nonlinear hardening stiffness of drive mode deal with the contradiction between gain and bandwidth of the linear micro-gyroscope, to improve the bandwidth and gain in sense direction. Firstly, in…
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Keywords:
gain;
nonlinear micro;
micro gyroscope;
gyroscope ... See more keywords