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Published in 2018 at "Applied optics"
DOI: 10.1364/ao.57.003890
Abstract: The development of laser heterodyne interferometry raises the requirements of measurement resolution and accuracy. However, periodic nonlinearity errors mainly suppress the accuracy of laser heterodyne interferometry. Based on the generation mechanism of nonlinearity errors, the…
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Keywords:
laser heterodyne;
errors laser;
nonlinearity errors;
heterodyne interferometry ... See more keywords