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Published in 2017 at "Advances in Mechanical Engineering"
DOI: 10.1177/1687814017725248
Abstract: In this article, a novel flexure-based 3-degree-of-freedom elliptical micro/nano-positioning motion stage was developed to obtain translation motions along the x, y, and z directions with high working bandwidth. The stage was configurations with a XYZ…
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Keywords:
motion;
based degree;
novel flexure;
motion stage ... See more keywords