Design and Optimization of a Novel MEMS Tuning Fork Gyroscope Microstructure
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DOI: 10.3390/mi13020172
Abstract: This paper presents the design and optimization of a novel MEMS tuning fork gyroscope microstructure. In order to improve the mechanical sensitivity of the gyroscope, much research has been carried out in areas such as… read more here.
Keywords: optimization novel; novel mems; design optimization; mems tuning ... See more keywords