High quality self-separated GaN crystal grown on a novel nanoporous template by HVPE
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DOI: 10.1038/s41598-018-21607-3
Abstract: In this study, a novel nanoporous template was obtained by a two-step etching process from MOCVD-GaN/Al2O3 (MGA) with electrochemical etching sequentially followed by chemical wet etching. The twice-etched MOCVD-GaN/Al2O3 (TEMGA) templates were utilized to grow… read more here.
Keywords: novel nanoporous; template; high quality; nanoporous template ... See more keywords