A novel silicon etching method using vapor of tetramethylammonium hydroxide solution
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DOI: 10.1063/1674-0068/cjcp2007116
Abstract: Silicon bulk etching is an important part of micro-electro-mechanical system (MEMS) technology. In this work, a novel etching method is proposed based on the vapor from TMAH solution heated up to boiling point. The monocrystalline… read more here.
Keywords: etching method; solution; rate; novel silicon ... See more keywords
A Novel Silicon Allotrope in the Monoclinic Phase
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DOI: 10.3390/ma10040441
Abstract: This paper describes a new silicon allotrope in the P2/m space group found by first-principles calculations using the Cambridge Serial Total Energy Package (CASTEP) plane-wave code. The examined P2/m-Si belongs to the monoclinic crystal system.… read more here.
Keywords: novel silicon; silicon allotrope; monoclinic phase; allotrope monoclinic ... See more keywords