An insight into optical beam induced current microscopy: Concepts and applications
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DOI: 10.1002/jemt.24212
Abstract: Laser scanning optical beam induced current (OBIC) microscopy has become a powerful and nondestructive alternative to other complicated methods like electron beam induced current (EBIC) microscopy, for high resolution defect analysis of electronic devices. OBIC… read more here.
Keywords: obic microscopy; beam; beam induced; microscopy ... See more keywords