On the fabrication of micro- and nano-sized objects: the role of interstitial clusters
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DOI: 10.1007/s10853-018-2067-0
Abstract: Abstract Ion-induced bending phenomena were studied in free-standing nano-sized Al cantilevers with thicknesses in the range of 89–200 nm. The objective is to present a predictive and useful model for the fabrication of micro- and nano-sized… read more here.
Keywords: fabrication micro; interstitial clusters; objects role; nano sized ... See more keywords